A Technique for Modeling and Simulating Transistor Based MEMS Sensors

Type

Authors

Martha P.; Sebastian A.; Seena V.; Kadayinti N.

Source title

INERTIAL 2021 - 8th IEEE International Symposium on Inertial Sensors and Systems, Proceedings

DOI

10.1109/INERTIAL51137.2021.9430485

Publication Year